Перегляд за автором "Strigunovskiy, S.V."

Сортувати за: Порядок: Результатів:

  • Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge 
    Deryzemlia, A.N.; Yevsiukov, A.I.; Radchenko, V.I.; Khizhnyak, D.A.; Kryshtal, P.G.; Zhuravlov, A.Yu.; Shijan, A.V.; Strigunovskiy, S.V.; Pelypets, Yu.A.; Shirokov, B.M. (Вопросы атомной науки и техники, 2019)
    In this work, silicon is obtained by plasma-chemical reduction of silicon tetrachloride in an argon-hydrogen low- temperature nonequilibrium plasma. It is shown that in the investigated range of process parameters, the ...
  • Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods 
    Zhuravlov, А.Yu.; Hovanskiy, N.А.; Khizhnyak, D.A.; Shirokov, B.M.; Semenov, N.A.; Shijan, А.V.; Strigunovskiy, S.V.; Yevsiukov, A.I.; Shevtsov, A.B.; Nazarenko, E.A.; Pilipenko, N.N. (Вопросы атомной науки и техники, 2017)
    In the present paper the results of studies on obtaining silicon carbide via chemical gas phase, plasma-chemical and sublimation methods are described. The thermodynamic analysis of chemical reactions of silicon carbide ...